- Patent Title: Photocurable composition, and methods using the same for forming cured product pattern and for manufacturing optical component, circuit board and imprinting mold
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Application No.: US15506214Application Date: 2015-08-18
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Publication No.: US10593547B2Publication Date: 2020-03-17
- Inventor: Toshiki Ito , Takeshi Honma , Shiori Yonezawa
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2014-171224 20140826; JP2015-117799 20150610
- International Application: PCT/JP2015/004082 WO 20150818
- International Announcement: WO2016/031175 WO 20160303
- Main IPC: H01L21/027
- IPC: H01L21/027 ; C08F2/44 ; C08F2/48 ; G03F7/027 ; C09D4/00 ; C08F2/50 ; C08F222/10 ; G03F7/00

Abstract:
A photocurable composition contains a polymerizable compound (A) satisfying OA=NA/(NC,A−NO,A), wherein NA, NC,A and NO,A represent the total number of atoms, the number of carbon atoms, and the number of oxygen atoms, respectively, in (A); and a non-polymerizable component (E) containing at least one compound (X) including a photopolymerization initiator (B), in a proportion of 10% to 50% relative to the total weight of (A) and (E). The component (E) has a weight average molecular weight of 250 or less. The compound (X) satisfies OX=NX/(NC,X−NO,X). NX, NC,X and NO,X represent the total number of atoms, the number of carbon atoms, and the number of oxygen atoms, respectively, in the corresponding compound (X). The composition satisfies: OA−OE>1.00; and OAE
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