Invention Grant
- Patent Title: Substrate container with window retention spring
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Application No.: US15480736Application Date: 2017-04-06
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Publication No.: US10593577B2Publication Date: 2020-03-17
- Inventor: Russ V. Raschke , Jason T. Steffens
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/67

Abstract:
A reticle container for containing a reticle including a base plate having one or more windows. Each of the windows can include mounting recess having a recess sidewall including an undercut defined therein. A transparent substrate can be disposed in the mounting recess and is retained therein by a retention member having an arcuate portion extending between a first end portion and a second end portion. At least the first end portion of the retention member can be positioned in the undercut defined in the recess sidewall such that the arcuate portion of the retention member contacts the transparent substrate to retain the transparent substrate in the mounting recess.
Public/Granted literature
- US20170294326A1 SUBSTRATE CONTAINER WITH WINDOW RETENTION SPRING Public/Granted day:2017-10-12
Information query
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