Invention Grant
- Patent Title: Transfer head and method for transferring micro devices
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Application No.: US15904441Application Date: 2018-02-26
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Publication No.: US10593581B2Publication Date: 2020-03-17
- Inventor: Li-Yi Chen
- Applicant: MIKRO MESA TECHNOLOGY CO., LTD.
- Applicant Address: WS Apia
- Assignee: MIKRO MESA TECHNOLOGY CO., LTD.
- Current Assignee: MIKRO MESA TECHNOLOGY CO., LTD.
- Current Assignee Address: WS Apia
- Agency: CKC & Partners Co., LLC
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B81C99/00 ; H01L21/67
Abstract:
A transfer head is provided. The transfer head includes a body having a plurality of arrays of grip regions with each of the arrays comprising at least two columns of the grip regions. The grip regions in one of the columns are electrically connected in series. The columns in one of the arrays are controlled by a single voltage source, and the columns in two of the arrays are controlled by two voltage sources respectively.
Public/Granted literature
- US20190267271A1 TRANSFER HEAD AND METHOD FOR TRANSFERRING MICRO DEVICES Public/Granted day:2019-08-29
Information query
IPC分类:
