Invention Grant
- Patent Title: Cleaning liquid, anticorrosion agent, and method for manufacturing the same
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Application No.: US15855173Application Date: 2017-12-27
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Publication No.: US10597609B2Publication Date: 2020-03-24
- Inventor: Takumi Namiki , Takayuki Haraguchi , Yu-Geng Wu
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: JP2016-257441 20161229; JP2017-239822 20171214
- Main IPC: C11D7/50
- IPC: C11D7/50 ; C11D3/00 ; C11D3/30 ; C11D11/00 ; B08B3/08 ; C23F11/06 ; C23F11/04 ; H01L21/311 ; C11D7/32 ; C23F11/14 ; H01L21/02 ; H01L21/321

Abstract:
A cleaning liquid and an anticorrosion agent having an excellent corrosion inhibition function, and a method for manufacturing the same. The cleaning liquid contains alkanol hydroxyamine represented by general formula (1), alkanolamine represented by general formula (2), a solvent, and a basic compound other than the alkanol hydroxyamine and the alkanolamine or an acidic compound. In the general formula (1), Ra1 and Ra2 each independently represents a C1-C10 alkyl group having one to three hydroxy groups, or a hydrogen atom, Ra1 and Ra2 are not simultaneously a hydrogen atom, and Rb1 and Rb2 are not simultaneously a hydrogen atom.
Public/Granted literature
- US20180187128A1 CLEANING LIQUID, ANTICORROSION AGENT, AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2018-07-05
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