Invention Grant
- Patent Title: Cleaning liquid and method for manufacturing the same
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Application No.: US15855362Application Date: 2017-12-27
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Publication No.: US10597616B2Publication Date: 2020-03-24
- Inventor: Takumi Namiki , Takayuki Haraguchi , Yu-Geng Wu
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki-shi
- Assignee: TOYOTA OHKA KOGYO CO., LTD.
- Current Assignee: TOYOTA OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: JP2016-257442 20161229; JP2017-239823 20171214
- Main IPC: C11D7/50
- IPC: C11D7/50 ; C11D7/32 ; C11D7/26 ; H01L21/02 ; C11D11/00 ; C11D7/06

Abstract:
A cleaning liquid having an excellent corrosion inhibition function, and a method for manufacturing the same. The cleaning liquid contains alkanol hydroxyamine represented by general formula (1), and a basic compound other than the alkanol hydroxyamine. In the formula, Ra1 and Ra2 each independently represents a C1-C10 alkyl group having one to three hydroxy groups, or a hydrogen atom, and Ra1 and Ra2 are not simultaneously a hydrogen atom.
Public/Granted literature
- US20180187133A1 CLEANING LIQUID AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2018-07-05
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