Invention Grant
- Patent Title: Bearing device and ion implantation device
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Application No.: US15816341Application Date: 2017-11-17
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Publication No.: US10598220B2Publication Date: 2020-03-24
- Inventor: Chenliang Liu , Donghua Jiang , Yongyi Fu , Chao Tan , Xuewei Wang , Rujian Li , Kang Luo , Yongzhou Ling , Yin Xie , Jianbo Yang , Fei Li
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Chengdu, Sichuan
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Chengdu, Sichuan
- Agency: Brooks Kushman P.C.
- Priority: CN201710137906 20170309
- Main IPC: F16C29/06
- IPC: F16C29/06 ; F16M11/04 ; H01J37/20 ; H01L21/68 ; G03F7/20
Abstract:
A bearing device and an ion implantation device are provided. The bearing device includes a bearing table configured to bear a substrate, and a plurality of supporting components configured to support the substrate, each supporting component is movably arranged on the bearing table, to support the substrate at an adjustable position.
Public/Granted literature
- US20180258988A1 BEARING DEVICE AND ION IMPLANTATION DEVICE Public/Granted day:2018-09-13
Information query
