Invention Grant
- Patent Title: Stacked balanced resonators
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Application No.: US15841782Application Date: 2017-12-14
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Publication No.: US10598491B2Publication Date: 2020-03-24
- Inventor: Khalil Najafi , Ali Darvishian
- Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Applicant Address: US MI Ann Arbor
- Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Current Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
- Current Assignee Address: US MI Ann Arbor
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G01C19/574
- IPC: G01C19/574 ; H03H9/00 ; H03H9/02 ; H03H9/24

Abstract:
A resonator array comprises substantially paralleled first and second resonant layers having resonating masses. A first set of lateral drive electrodes cause the first resonating mass to vibrate along an axis in a first geometric plane. A second set of lateral drive electrodes cause the second resonating mass to vibrate along an axis in a second geometric plane in an opposite direction of the first resonating mass by about 180 degrees. Rotation in the system causes the masses to vibrate out-of-plane in opposite directions. The opposite vibrational directions of the first and second resonating masses produces a balanced system with small motion in a bonding area between the stacked resonators. As a result, there is minimal propagation of mechanical waves from the balanced system to a substrate resulting in lower anchor loss and a high Q-factor.
Public/Granted literature
- US20180283866A1 Stacked Balanced Resonators Public/Granted day:2018-10-04
Information query
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