Invention Grant
- Patent Title: Micromechanical z-acceleration sensor
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Application No.: US15785891Application Date: 2017-10-17
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Publication No.: US10598686B2Publication Date: 2020-03-24
- Inventor: Antoine Puygranier , Denis Gugel , Guenther-Nino-Carlo Ullrich , Markus Linck-Lescanne , Sebastian Guenther , Timm Hoehr
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102016220510 20161019
- Main IPC: G01P15/08
- IPC: G01P15/08 ; B81C1/00 ; G01P15/03

Abstract:
A micromechanical z-acceleration sensor, including a seismic mass element including a torsion spring; the torsion spring including an anchor element, with the aid of which the torsion spring is connected to a substrate; the torsion spring being connected at both ends to the seismic mass element with the aid of a bar-shaped connecting element designed as normal with respect to the torsion spring in the plane of the seismic mass element.
Public/Granted literature
- US20180106828A1 MICROMECHANICAL Z-ACCELERATION SENSOR Public/Granted day:2018-04-19
Information query
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