Invention Grant
- Patent Title: Scanning probe microscope and light intensity adjusting method
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Application No.: US16290391Application Date: 2019-03-01
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Publication No.: US10598691B2Publication Date: 2020-03-24
- Inventor: Kazuma Watanabe , Keita Fujino , Eiji Iida , Masato Hirade , Kenji Yamasaki , Hideo Nakajima , Yuichiro Ikeda , Hiroshi Arai
- Applicant: Shimadzu Corporation
- Applicant Address: JP Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto-shi, Kyoto
- Assignee: Shimadzu Corporation
- Current Assignee: Shimadzu Corporation
- Current Assignee Address: JP Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto-shi, Kyoto
- Agency: Muir Patent Law, PLLC
- Priority: JP2018-083791 20180425
- Main IPC: G01Q20/02
- IPC: G01Q20/02 ; G01Q30/18 ; G01Q30/04 ; G01Q10/06

Abstract:
A scanning probe microscope includes a light source, a detector, a housing, an opening and closing door, an opening and closing sensor, a control unit, and the like. The opening and closing door is provided in the housing. The control unit 16 also functions as the light intensity change processing unit 164. In the scanning probe microscope, when the opening and closing sensor detects opening and closing of the opening and closing door, the light intensity change processing unit automatically changes the intensity of light irradiated from the light source based on a detection result of the opening and closing sensor. Therefore, it is possible to omit light intensity adjustment work performed manually by the user. As a result, the workability of the user when using the scanning probe microscope 1 can be improved.
Public/Granted literature
- US20190331711A1 SCANNING PROBE MICROSCOPE AND LIGHT INTENSITY ADJUSTING METHOD Public/Granted day:2019-10-31
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