Invention Grant
- Patent Title: Sputtering target for forming magnetic recording film and method for producing same
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Application No.: US15513017Application Date: 2015-07-07
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Publication No.: US10600440B2Publication Date: 2020-03-24
- Inventor: Shin-ichi Ogino
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2014-192926 20140922
- International Application: PCT/JP2015/069476 WO 20150707
- International Announcement: WO2016/047236 WO 20160331
- Main IPC: C22C5/04
- IPC: C22C5/04 ; C22C1/10 ; C23C14/34 ; C22C1/04 ; C22C29/00 ; B22F3/15 ; C23C14/16 ; H01F1/06 ; H01F41/18 ; H01J37/34 ; G11B5/851 ; C22F1/00

Abstract:
An FePt-based sintered sputtering target containing C and/or BN, wherein an area ratio of AgCu alloy grains on a polished surface of a cross section that is perpendicular to a sputtered surface of the sputtering target is 0.5% or more and 15% or less. An object of this invention is to provide a sputtering target capable of reducing particles generation during sputtering and efficiently depositing a magnetic thin film of a magnetic recording medium.
Public/Granted literature
- US20170294203A1 Sputtering Target for Forming Magnetic Recording Film and Method for Producing Same Public/Granted day:2017-10-12
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