- Patent Title: Process kit with adjustable tuning ring for edge uniformity control
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Application No.: US16131903Application Date: 2018-09-14
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Publication No.: US10600623B2Publication Date: 2020-03-24
- Inventor: Yogananda Sarode Vishwanath
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Priority: IN201841019829 20180528
- Main IPC: H01L21/26
- IPC: H01L21/26 ; H01L21/324 ; H01L21/42 ; H01L21/477 ; H01J37/32 ; H01L21/687 ; H01L21/683 ; H01L21/3065
Abstract:
Process kits, processing chambers, and methods for processing a substrate are provided. The process kit includes an edge ring, an adjustable tuning ring, and an actuating mechanism. The edge ring has a first ring component interfaced with a second ring component that is movable relative to the first ring component forming a gap therebetween. The second ring component has an inner thickness that is less than an outer thickness, and at least a portion of an upper surface of the second ring component is inwardly angled towards the ring first component. The adjustable tuning ring has an upper surface that contacts the lower surface of the second ring component. The actuating mechanism is interfaced with the lower surface of the adjustable tuning ring and is configured to actuate the adjustable tuning ring such that the gap between the first ring component and the second ring component is varied.
Public/Granted literature
- US20190362948A1 PROCESS KIT WITH ADJUSTABLE TUNING RING FOR EDGE UNIFORMITY CONTROL Public/Granted day:2019-11-28
Information query
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