Invention Grant
- Patent Title: Directed self-assembly for copper patterning
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Application No.: US15818947Application Date: 2017-11-21
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Publication No.: US10600656B2Publication Date: 2020-03-24
- Inventor: Eric A. Joseph , Hiroyuki Miyazoe , Adam M. Pyzyna , HsinYu Tsai
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Kelsey M. Skodje
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/3213 ; H01L23/532 ; H01L23/528 ; H01L21/768 ; H01L27/24

Abstract:
A process for forming patterned copper lines, a pattern of copper lines, and an electronic device having patterned copper lines and at least one CMOS circuit. The process includes assembling an etch stack, wherein the etch stack includes a resist and a copper substrate. The process also includes lithographically patterning the resist to produce a template, and forming a patterned block copolymer mask layer by directed self-assembly. Additionally, the process includes etching portions of the block copolymer mask layer to produce a patterned block copolymer mask layer, and transferring a pattern formed by the template and the patterned block copolymer mask layer to the copper substrate to form the patterned copper lines.
Public/Granted literature
- US20190157106A1 DIRECTED SELF-ASSEMBLY FOR COPPER PATTERNING Public/Granted day:2019-05-23
Information query
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