Invention Grant
- Patent Title: Adsorption device, conveyance device, and EL device manufacturing device
-
Application No.: US16069178Application Date: 2017-03-30
-
Publication No.: US10600668B2Publication Date: 2020-03-24
- Inventor: Fumihiko Mashiro
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai
- Agency: Keating & Bennett, LLP
- International Application: PCT/JP2017/013182 WO 20170330
- International Announcement: WO2018/179201 WO 20181004
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/677 ; H01L51/56
Abstract:
An adsorption device including one or more adsorption pads, wherein the adsorption device is configured to adsorb a lower surface film via the one or more adsorption pads, and the one or more adsorption pads are formed of a porous material having an average pore diameter of 1.0 μm or less.
Public/Granted literature
- US20190362999A1 ADSORPTION DEVICE, CONVEYANCE DEVICE, AND EL DEVICE MANUFACTURING DEVICE Public/Granted day:2019-11-28
Information query
IPC分类:
