Invention Grant
- Patent Title: Controlling grain boundaries in high aspect-ratio conductive regions
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Application No.: US16003766Application Date: 2018-06-08
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Publication No.: US10600686B2Publication Date: 2020-03-24
- Inventor: Conal Murray , Chih-Chao Yang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/532

Abstract:
Methods for forming high aspect-ratio conductive regions of a metallization network with reduced grain boundaries are described. Aspects of the invention include forming a trench in a dielectric material on the substrate. A conductive material is formed in the trench, wherein the conductive material includes a first grain boundary level. Portions of the dielectric material are removed to expose sidewalls of the conductive material. The conductive material is annealed to reduce the first grain boundary level.
Public/Granted literature
- US20190378755A1 CONTROLLING GRAIN BOUNDARIES IN HIGH ASPECT-RATIO CONDUCTIVE REGIONS Public/Granted day:2019-12-12
Information query
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