Invention Grant
- Patent Title: Bonding method
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Application No.: US16098231Application Date: 2017-02-28
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Publication No.: US10600754B2Publication Date: 2020-03-24
- Inventor: Hideki Yoshino , Masaaki Miura
- Applicant: KAIJO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KAIJO CORPORATION
- Current Assignee: KAIJO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2016-157942 20160810
- International Application: PCT/JP2017/007852 WO 20170228
- International Announcement: WO2018/029881 WO 20180215
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/68 ; H01L21/677 ; H01L21/66

Abstract:
There is provided a bonding method capable of accurately positioning a bonding stage. According to an aspect of the present invention, a bonding method using a bonding apparatus including a rotation drive mechanism for rotating a bonding stage 1 about a θ-axis includes the steps of: (e) locking the bonding stage with respect to the θ-axis, and bonding a wire or bump onto a certain area of a substrate held on the bonding stage; (f) unlocking the bonding stage with respect to the θ-axis, and rotating the bonding stage about the θ-axis with the rotation drive mechanism; and (g) locking the bonding stage with respect to the θ-axis, and bonding a wire or bump onto a remaining region of the substrate.
Public/Granted literature
- US20190164928A1 BONDING METHOD Public/Granted day:2019-05-30
Information query
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