Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16120412Application Date: 2018-09-03
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Publication No.: US10600803B2Publication Date: 2020-03-24
- Inventor: Yusuke Nakanishi , Takaya Yamanaka , Akira Matsumura
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: JP2017-252120 20171227
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565 ; H01L27/1157 ; H01L27/11575 ; H01L27/11519 ; H01L23/532 ; G11C16/26 ; G11C16/04 ; G11C16/08

Abstract:
A semiconductor memory device includes first and second wiring layers above a semiconductor substrate, a memory pillar extending through the first and second wiring layers, a first plug contacting the first wiring layer, a second plug contacting the second wiring layer, a first pillar adjacent to the first plug and extending through the first wiring layer, and a second pillar adjacent to the second plug and extending through the first and second wiring layers. The memory pillar includes a first semiconductor layer, a second semiconductor layer over the first semiconductor layer, and a third insulating layer, a charge storage layer, and a fourth insulating layer on a side surface of the second semiconductor layer. The distance between the center of the first plug and the center of the first pillar is greater than the distance between the center of the second plug and the center of the second pillar.
Public/Granted literature
- US20190198523A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-06-27
Information query
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