Invention Grant
- Patent Title: Solid-state imaging element, sensor apparatus, and electronic device
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Application No.: US16086697Application Date: 2017-03-17
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Publication No.: US10600828B2Publication Date: 2020-03-24
- Inventor: Yoshiharu Kudoh
- Applicant: SONY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SONY CORPORATION
- Current Assignee: SONY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Sheridan Ross P.C.
- Priority: JP2016-072167 20160331
- International Application: PCT/JP2017/010865 WO 20170317
- International Announcement: WO2017/169884 WO 20171005
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L29/423 ; H01L29/78 ; H04N5/374 ; H04N5/378

Abstract:
The present disclosure relates to a solid-state imaging element, a sensor apparatus, and an electronic device capable of achieving better characteristics. A transistor constituting a pixel includes: a gate electrode having at least two fin portions formed so as to be buried from a planar portion planarly formed on a surface of a semiconductor substrate toward an inside of the semiconductor substrate; and a channel portion provided across a source and a drain so as to be in contact with side surfaces of the fin portions via an insulating film. In addition, a width of the channel portion is formed to be narrower than a depth of the fin portion. The present technology is applicable to a CMOS image sensor, for example.
Public/Granted literature
- US20190123079A1 SOLID-STATE IMAGING ELEMENT, SENSOR APPARATUS, AND ELECTRONIC DEVICE Public/Granted day:2019-04-25
Information query
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