Invention Grant
- Patent Title: Electric field imaging device
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Application No.: US16081732Application Date: 2017-02-06
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Publication No.: US10600837B2Publication Date: 2020-03-24
- Inventor: Masahiro Tsuchiya
- Applicant: NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY
- Applicant Address: JP Tokyo
- Assignee: NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2016-040495 20160302
- International Application: PCT/JP2017/004151 WO 20170206
- International Announcement: WO2017/150078 WO 20170908
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G01R29/08 ; G02B5/30 ; G02F1/00 ; H01L25/16 ; H04N5/225

Abstract:
An electric field imaging device is provided with which it is possible to visualize as a dynamic state an electromagnetic field intensity distribution and a phase delay/advance distribution in the vicinity of a product, using a sample of the actual product without lead-out lines. The electric field imaging device includes: an antenna which accepts a high-frequency signal emitted by the sample as an input; an electrooptic (EO) crystal plate which is a frequency fRF high-frequency electric field sensor; a flashing light source which radiates polarized light onto the EO crystal plate; an optical system leading to an analyzer for detecting phase changes in polarized light obtained by means of the EO crystal plate; an image capturing device which converts an in-plane distribution of optical beam from the analyzer into an electrical signal; and an information processing device which processes and displays an output signal from the image capturing device.
Public/Granted literature
- US20190140007A1 ELECTRIC FIELD IMAGING DEVICE Public/Granted day:2019-05-09
Information query
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