Invention Grant
- Patent Title: Precise/designable FinFET resistor structure
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Application No.: US15908410Application Date: 2018-02-28
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Publication No.: US10600860B2Publication Date: 2020-03-24
- Inventor: Praneet Adusumilli , Shanti Pancharatnam , Alexander Reznicek , Oscar van der Straten
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris, Esq.
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L29/78 ; H01L21/02 ; H01L21/768 ; H01L27/08 ; H01L27/06 ; H01L21/82

Abstract:
A resistive material is formed straddling over each semiconductor fin that extends upward from a surface of a substrate. The resistive material is then disconnected by removing the resistive material from atop each semiconductor fin. Remaining resistive material in the form of a U-shaped resistive material liner is present between each semiconductor fin. Contact structures are formed perpendicular to each semiconductor fin and contacting a portion of a first set of the semiconductor fins and a first set of the U-shaped resistive material liners.
Public/Granted literature
- US20180190755A1 PRECISE/DESIGNABLE FINFET RESISTOR STRUCTURE Public/Granted day:2018-07-05
Information query
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