Invention Grant
- Patent Title: Transistor trench structure with field plate structures
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Application No.: US15918563Application Date: 2018-03-12
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Publication No.: US10600879B2Publication Date: 2020-03-24
- Inventor: Bernhard Grote , Saumitra Raj Mehrotra , Ljubo Radic , Vishnu Khemka
- Applicant: NXP USA, INC.
- Applicant Address: US TX Austin
- Assignee: NXP USA, INC.
- Current Assignee: NXP USA, INC.
- Current Assignee Address: US TX Austin
- Agent David G. Dolezal
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/423 ; H01L29/66 ; H01L27/088 ; H01L29/78 ; H01L21/8234

Abstract:
A trench structure is located directly laterally between a first well and a first source region for a first transistor and the second well region with a second source for a second transistor. The trench structure includes a first gate structure for the first transistor, a second gate structure for the second transistor, a first conductive field plate structure, and a second conductive field plate structure. The first gate structure, the first field plate structure, the second field plate structure, and the second gate structure are located in the trench structure in a lateral line between the first well region and the second well region. The trench structure includes a dielectric separating the first field plate structure and the second field plate structure from each other in the lateral line. A drain region for the first transistor and the second transistor includes a portion located directly below the trench structure.
Public/Granted literature
- US20190280094A1 TRANSISTOR TRENCH STRUCTURE WITH FIELD PLATE STRUCTURES Public/Granted day:2019-09-12
Information query
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