Invention Grant
- Patent Title: Smoothing surface roughness of III-V semiconductor fins formed from silicon mandrels by regrowth
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Application No.: US16367479Application Date: 2019-03-28
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Publication No.: US10600891B2Publication Date: 2020-03-24
- Inventor: Tze-Chiang Chen , Cheng-Wei Cheng , Sanghoon Lee , Effendi Leobandung
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/10 ; H01L29/78 ; H01L21/02 ; H01L29/786 ; H01L21/033 ; H01L21/8234

Abstract:
A method of forming a III-V semiconductor vertical fin is provided. The method includes forming a fin mandrel on a substrate, forming a spacer layer on the substrate surrounding the fin mandrel, forming a wetting layer on each of the sidewalls of the fin mandrel, forming a fin layer on each of the wetting layers, removing the fin mandrel, removing the wetting layer on each of the fin layers, and forming a fin layer regrowth on each of the sidewalls of the fin layers exposed by removing the wetting layer from each of the fin layers.
Public/Granted literature
- US20190237565A1 SMOOTHING SURFACE ROUGHNESS OF III-V SEMICONDUCTOR FINS FORMED FROM SILICON MANDRELS BY REGROWTH Public/Granted day:2019-08-01
Information query
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