Invention Grant
- Patent Title: Metal plate, method of manufacturing metal plate, and method of manufacturing mask by using metal plate
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Application No.: US15309468Application Date: 2015-04-28
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Publication No.: US10600963B2Publication Date: 2020-03-24
- Inventor: Chikao Ikenaga
- Applicant: Dai Nippon Printing Co., Ltd.
- Applicant Address: JP Shinjuka-Ku
- Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee: Dai Nippon Printing Co., Ltd.
- Current Assignee Address: JP Shinjuka-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2014-099811 20140513
- International Application: PCT/JP2015/062782 WO 20150428
- International Announcement: WO2015/174269 WO 20151119
- Main IPC: H01L51/00
- IPC: H01L51/00 ; C23C14/04 ; B21B15/00 ; B21B1/40 ; B21B3/02 ; C23F1/02 ; H05B33/10 ; H01L51/50

Abstract:
A metal plate for manufacturing a deposition mask with reduced variation in dimension of through-holes wherein an average value of plate thicknesses of the metal plate in a longitudinal direction is within a ±3% range around a predetermined value. When an average value of the plate thicknesses of the metal plate in the longitudinal direction is represented as A, and a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the longitudinal direction by 3 is represented as B, (B/A)×100 (%) is ≤5%. When a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the width direction by 3 is represented as C, and a value of a plate thickness of the metal plate at a central portion in the width direction is represented as X, (C/X)×100(%) is ≤3%.
Public/Granted literature
- US20170141315A1 METAL PLATE, METHOD OF MANUFACTURING METAL PLATE, AND METHOD OF MANUFACTURING MASK BY USING METAL PLATE Public/Granted day:2017-05-18
Information query
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