Invention Grant
- Patent Title: Electrostatic chuck and electrostatic adsorption apparatus
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Application No.: US15797488Application Date: 2017-10-30
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Publication No.: US10601346B2Publication Date: 2020-03-24
- Inventor: Min Ho Bae , Byung-Moo Kim , Yun Soo Kim , Tae-Ho Youn
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2016-0146022 20161103
- Main IPC: H02N13/00
- IPC: H02N13/00 ; H01L21/68 ; H01L21/683 ; H01L21/687

Abstract:
An electrostatic chuck and an electrostatic adsorption apparatus are provided. According to one or more exemplary embodiments, an electrostatic chuck includes: a main body portion including a body portion provided with a through-hole, and a transparent resin portion filled in the through-hole; a transparent cushion layer on the main body portion and covering the transparent resin portion; an electrode layer on the transparent cushion layer; and a dielectric layer on the electrode layer.
Public/Granted literature
- US20180123486A1 ELECTROSTATIC CHUCK AND ELECTROSTATIC ADSORPTION APPARATUS Public/Granted day:2018-05-03
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