Invention Grant
- Patent Title: Macroparticle filter device and method for use in cathodic arc deposition
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Application No.: US15628904Application Date: 2017-06-21
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Publication No.: US10604835B2Publication Date: 2020-03-31
- Inventor: Juergen Ramm , Beno Widrig , Richard Rachbauer
- Applicant: Oerlikon Surface Solutions AG, Pfaffikon
- Applicant Address: CH Pfäffikon SZ
- Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Current Assignee Address: CH Pfäffikon SZ
- Agency: Pearne & Gordon LLP
- Priority: EP16001452 20160629
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/22 ; H01J37/32 ; C23C14/56 ; C23C14/32 ; C23C14/06 ; C23C14/14 ; H01M4/02

Abstract:
A macroparticle filter device for cathodic arc evaporation, to be placed between at least one arc evaporation source and at least one substrate exhibiting at least a surface to be coated with material evaporated from a cathode of the arc evaporation source in a vacuum coating chamber. The macroparticle filter device includes one or more filter components that can prevent macroparticles emitted by the cathode during cathodic arc evaporation to arrive the substrate surface to be coated. The at least one component is provided as one or more flexible sheets that block the lineal way of the macroparticles from the cathode to the substrate surface to be coated. Further a method for utilizing the macroparticle filter device is presented.
Public/Granted literature
- US20180002805A1 MACROPARTICLE FILTER DEVICE AND METHOD FOR USE IN CATHODIC ARC DEPOSITION Public/Granted day:2018-01-04
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