- Patent Title: Liquid level indicator and liquid raw material vaporization feeder
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Application No.: US15525479Application Date: 2015-11-02
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Publication No.: US10604840B2Publication Date: 2020-03-31
- Inventor: Atsushi Hidaka , Masaaki Nagase , Kaoru Hirata , Satoru Yamashita , Keiji Hirao , Kouji Nishino , Nobukazu Ikeda
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Merchant & Gould, P.C.
- Priority: JP2014-231119 20141113
- International Application: PCT/JP2015/005498 WO 20151102
- International Announcement: WO2016/075892 WO 20160519
- Main IPC: H01L21/31
- IPC: H01L21/31 ; C23C16/455 ; B01J4/00 ; G01F23/24 ; C23C16/448 ; G01F23/26 ; H01L21/67 ; G01F23/22

Abstract:
To provide a liquid level indicator and a liquid raw material vaporization feeder, in which the time to detect a switch from the liquid phase to the gas phase has reduced flow rate dependence, and also the detection time can be shortened. The present invention includes a chamber 2 that stores a liquid raw material, at least one protection tube 3 housing a resistance temperature detector for detecting the liquid level L1 in the chamber 2, and a flow controller 4 that controls the flow rate of the gas flowing out from the chamber 2 and feeds the same. The protection tube 3 is horizontally inserted into a sidewall 2a of the chamber 2 and fixed thereto.
Public/Granted literature
- US20170327949A1 LIQUID LEVEL INDICATOR AND LIQUID RAW MATERIAL VAPORIZATION FEEDER Public/Granted day:2017-11-16
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