Invention Grant
- Patent Title: Device for vertical galvanic metal deposition on a substrate
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Application No.: US16316384Application Date: 2017-08-18
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Publication No.: US10604861B2Publication Date: 2020-03-31
- Inventor: Ray Weinhold
- Applicant: Atotech Deutschland GmbH
- Applicant Address: DE Berlin
- Assignee: Atotech Deutschland GmbH
- Current Assignee: Atotech Deutschland GmbH
- Current Assignee Address: DE Berlin
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: EP16185396 20160823
- International Application: PCT/EP2017/070942 WO 20170818
- International Announcement: WO2018/036924 WO 20180301
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D3/38 ; C25D5/02 ; C25D5/08 ; C25D17/12 ; H01L21/288

Abstract:
Device for vertical galvanic metal deposition on a substrate comprising a first and a second device, arranged vertically parallel to each other; the first device comprising a first anode having a plurality of through-going conduits and a first carrier having a plurality of through-going conduits; wherein said first anode and said first carrier are connected to each other; wherein the second device comprises a first substrate holder adapted to receive a first substrate to be treated, wherein said first substrate holder at least partially surrounds the first substrate along its outer frame, wherein the first device further comprises a plurality of plugs, each plug comprising a through-going channel, each plug arranged such that it runs from the backside of the first carrier through a through-going conduit of the first carrier and further through the conduit of the first anode element, and the plugs are detachably connected to the first device.
Public/Granted literature
- US20190292679A1 DEVICE FOR VERTICAL GALVANIC METAL DEPOSITION ON A SUBSTRATE Public/Granted day:2019-09-26
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