Cleaning device and cleaning method
Abstract:
A cleaning device for removing organic liquid residues remaining on a surface of a display substrate, includes a decomposition unit, an atomization unit, a stripping unit and a collection unit; the decomposition unit is configured for changing molecular structures of the organic liquid residues to reduce the adhesive forces of the organic liquid residues on the display substrate; the atomization unit is configured for separating the organic liquid residues which has been treated by the decomposition unit from the surface of the display substrate; the stripping unit is configured for stripping the organic liquid residues which has been treated by the atomization unit from the surface of the display substrate; and the collection unit is configured for collecting the organic liquid residues stripped by the stripping unit.
Public/Granted literature
Information query
Patent Agency Ranking
0/0