Invention Grant
- Patent Title: Mask pattern verification method
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Application No.: US16100122Application Date: 2018-08-09
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Publication No.: US10606165B2Publication Date: 2020-03-31
- Inventor: Yayori Toriu , Masanari Kajiwara , Fumiharu Nakajima
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP2018-020959 20180208
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/36 ; G03F7/20 ; G03F1/70

Abstract:
According to one embodiment, a mask pattern verification method includes: calculating mask pattern data; calculating an optical image and a resist image; calculating a first feature amount and a second feature amount, using a plurality of algorithms; in each of the plurality of algorithms, comparing the first feature amount with a first threshold, and detecting a critical point candidate in a first pattern; in each of the plurality of algorithms, comparing the second feature amount with a second threshold, and detecting a critical point in the first pattern; and selecting at least one of the plurality of algorithms, and displaying a detection result of the critical point corresponding to a selected algorithm.
Public/Granted literature
- US20190243232A1 MASK PATTERN VERIFICATION METHOD Public/Granted day:2019-08-08
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