Invention Grant
- Patent Title: Manufacturing method of electrode pattern, thin film transistor and manufacturing method thereof, and display panel
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Application No.: US16322308Application Date: 2018-05-31
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Publication No.: US10607854B2Publication Date: 2020-03-31
- Inventor: Haixu Li , Zhanfeng Cao , Qi Yao , Jianguo Wang , Fanna Meng
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Collard & Roe, P.C.
- Priority: CN201710416020 20170605
- International Application: PCT/CN2018/089111 WO 20180531
- International Announcement: WO2018/223879 WO 20181213
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/3213 ; H01L29/786
Abstract:
Provided in an embodiment of the present invention are a manufacturing method of an electrode pattern, a thin film transistor and a manufacturing method thereof, and a display panel. The manufacturing method of an electrode pattern includes: forming a metal thin film; performing processing on the metal thin film to form a partner layer over a surface of the metal thin film, the partner layer being configured to react with a photoresist to form a hydrogen bond; and performing patterning to form an electrode.
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