Invention Grant
- Patent Title: System, apparatus, and method for processing substrates using acoustic energy
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Application No.: US16107525Application Date: 2018-08-21
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Publication No.: US10607864B2Publication Date: 2020-03-31
- Inventor: John A. Korbler , Carlos M. Ruiz , Michael Ioannou , Hongseong Son
- Applicant: NAURA Akrion Inc.
- Applicant Address: US PA Allentown
- Assignee: NAURA AKRION INC.
- Current Assignee: NAURA AKRION INC.
- Current Assignee Address: US PA Allentown
- Agency: The Belles Group, P.C.
- Main IPC: B06B1/06
- IPC: B06B1/06 ; H01L21/67

Abstract:
A system, apparatus, and method for processing substrates using acoustic energy. In one aspect, the invention can be a system for processing flat articles including a support for supporting the flat article and an acoustic energy treatment apparatus. The acoustic energy treatment apparatus may include a support arm and a plurality of transducer assemblies coupled thereto. The transducer assemblies may include a housing with a transducer coupled thereto, and the housings of the transducer assemblies may be arranged in an end-to-end manner. A trough may also be included that extends along at least a portion of a length of the transducer assemblies. The trough may serve as a reservoir that upon being filled and overflowed with a liquid allows the liquid to fluidly couple the transducer assemblies to the flat article.
Public/Granted literature
- US20190006205A1 SYSTEM, APPARATUS, AND METHOD FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY Public/Granted day:2019-01-03
Information query
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