Invention Grant
- Patent Title: Jet ablation die singulation systems and related methods
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Application No.: US16136026Application Date: 2018-09-19
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Publication No.: US10607889B1Publication Date: 2020-03-31
- Inventor: Michael J. Seddon
- Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Adam R. Stephenson, Ltd.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/78 ; H01L21/3065 ; H01L21/304 ; H01L23/31 ; H01L21/56

Abstract:
Implementations of a method singulating a plurality of semiconductor die. Implementations may include: forming a pattern in a back metal layer coupled on a first side of a semiconductor substrate where the semiconductor substrate includes a plurality of semiconductor die. The method may include etching substantially through a thickness of the semiconductor substrate at the pattern in the back metal layer and jet ablating a layer of passivation material coupled to a second side of the semiconductor substrate to singulate the plurality of semiconductor die.
Public/Granted literature
- US20200091000A1 JET ABLATION DIE SINGULATION SYSTEMS AND RELATED METHODS Public/Granted day:2020-03-19
Information query
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