Invention Grant
- Patent Title: Illumination device for desorbing molecules from inner walls of a processing chamber
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Application No.: US15682921Application Date: 2017-08-22
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Publication No.: US10608145B2Publication Date: 2020-03-31
- Inventor: Ricardo Mateo Ramirez, III
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C16/44 ; H01L33/48 ; H01L27/15
Abstract:
An illumination device is described for desorbing molecules from inner walls of a processing chamber. In some examples, the device includes a chassis, a plurality of light emitting diodes (LEDs) mounted to the chassis, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered, a thermally non-conductive main housing surrounding the chassis and configured to be placed on a wafer carrier of the processing chamber, and an electrical system to activate the LEDs within the processing chamber.
Public/Granted literature
- US20180323348A1 ILLUMINATION DEVICE FOR DESORBING MOLECULES FROM INNER WALLS OF A PROCESSING CHAMBER Public/Granted day:2018-11-08
Information query
IPC分类:
