Invention Grant
- Patent Title: Vibration sensor with integrated temperature detection
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Application No.: US15787614Application Date: 2017-10-18
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Publication No.: US10608160B2Publication Date: 2020-03-31
- Inventor: Dominik Fehrenbach , Volker Allgaier
- Applicant: VEGA GRIESHABER KG
- Applicant Address: DE Wolfach
- Assignee: Vega Grieshaber KG
- Current Assignee: Vega Grieshaber KG
- Current Assignee Address: DE Wolfach
- Agent William Gray Mitchell
- Priority: EP16194931 20161020
- Main IPC: H01L41/04
- IPC: H01L41/04 ; G01H11/08 ; G01K7/34 ; H01L41/113

Abstract:
A vibration sensor with a diaphragm that can be set into vibration, a piezo-electric drive for setting the diaphragm into vibration and for detecting vibrations in the diaphragm, with the drive having at least two serial mechanical piezo elements, a temperature sensor, with at least a first piezo element made from a first piezo-electric material and at least a second piezo element made from a second piezo-electric material.
Public/Granted literature
- US20180130939A1 Vibration sensor with integrated temperature detection Public/Granted day:2018-05-10
Information query
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