Vibration sensor with integrated temperature detection
Abstract:
A vibration sensor with a diaphragm that can be set into vibration, a piezo-electric drive for setting the diaphragm into vibration and for detecting vibrations in the diaphragm, with the drive having at least two serial mechanical piezo elements, a temperature sensor, with at least a first piezo element made from a first piezo-electric material and at least a second piezo element made from a second piezo-electric material.
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