Invention Grant
- Patent Title: Piezoelectric element and liquid ejecting head
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Application No.: US16223392Application Date: 2018-12-18
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Publication No.: US10608165B2Publication Date: 2020-03-31
- Inventor: Tomohiro Sakai , Koichi Morozumi , Kazuya Kitada , Harunobu Koike , Koji Sumi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corportion
- Current Assignee: Seiko Epson Corportion
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2017-244921 20171221
- Main IPC: H01L41/187
- IPC: H01L41/187 ; B41J2/14 ; H01L41/09 ; H01L41/318 ; H01L41/08

Abstract:
Provided is a piezoelectric element including a first electrode provided above a substrate, a piezoelectric layer provided above the first electrode, containing potassium, sodium, and niobium, and having a perovskite structure, and a second electrode provided above the piezoelectric layer. In a case where the piezoelectric layer is divided into two portions at a center thereof in a thickness direction, the piezoelectric layer includes a first portion on the first electrode side and a second portion on the second electrode side. The piezoelectric layer includes line defects. A density of the line defects in the second portion is higher than a density of the line defects in the first portion.
Public/Granted literature
- US20190198750A1 PIEZOELECTRIC ELEMENT AND LIQUID EJECTING HEAD Public/Granted day:2019-06-27
Information query
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