Invention Grant
- Patent Title: Self-gated RRAM cell and method for manufacturing the same
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Application No.: US15525200Application Date: 2014-12-26
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Publication No.: US10608177B2Publication Date: 2020-03-31
- Inventor: Hangbing Lv , Ming Liu , Qi Liu , Shibing Long
- Applicant: Institute of Microelectronics, Chinese Academy of Sciences
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Schwegman Lundberg & Woessner, P.A.
- International Application: PCT/CN2014/095080 WO 20141226
- International Announcement: WO2016/101246 WO 20160630
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
The present disclosure discloses a self-gated RRAM cell and a manufacturing method thereof; which belong to the field of microelectronic technology. The self-gated RRAM cell comprises: a stacked structure containing multiple layers of conductive lower electrodes; a vertical trench formed by etching the stacked structure; a M8XY6 gated layer formed on an inner wall and a bottom of the vertical trench; a resistance transition layer formed on a surface of the M8XY6, gated layer; and a conductive upper electrode formed on a surface of the resistance transition layer, the vertical trench being filled with the conductive upper electrode. The present disclosure is implemented on a basis of using the self-gated RRAM as a memory cell. It may not depend on a gated transistor and a diode, but relies on a non-linear variation characteristic of resistance of its own varied with voltage to achieve a self-gated function, which has a simple structure, easy integration, high density and low cost, capable of suppressing a reading crosstalk phenomenon in a cross array structure; and is also adapted for a planar stacked cross array structure and a vertical cross array structure, achieving 3D storage with a high density.
Public/Granted literature
- US20170331034A1 SELF-GATED RRAM CELL AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2017-11-16
Information query
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