Invention Grant
- Patent Title: Copper electrodeposition on cobalt lined features
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Application No.: US15941258Application Date: 2018-03-30
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Publication No.: US10648097B2Publication Date: 2020-05-12
- Inventor: Jeyavel Velmurugan , Bryan L. Buckalew , Thomas A. Ponnuswamy
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: C25D3/38
- IPC: C25D3/38 ; C25D7/12 ; C25D3/56 ; C25D17/00 ; C25D5/34 ; H01L21/288 ; H01L21/768 ; H01L23/48 ; H01L23/532

Abstract:
In one example, an electroplating system comprises a bath reservoir, a holding device, an anode, a direct current power supply, and a controller. The bath reservoir contains an electrolyte solution. The holding device holds a wafer submerged in the electrolyte solution. The wafer comprises features covered by a cobalt layer. The anode is opposite to the wafer and submerged in the electrolyte solution. The direct current power supply generates a direct current between the holding device and the anode. A combination of forward and reverse pulses is applied between the holding device and the anode to electroplate a copper layer on the cobalt layer of the wafer.
Public/Granted literature
- US20190301040A1 COPPER ELECTRODEPOSITION ON COBALT LINED FEATURES Public/Granted day:2019-10-03
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