Invention Grant
- Patent Title: Library expansion system, method, and computer program product for metrology
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Application No.: US14710462Application Date: 2015-05-12
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Publication No.: US10648793B2Publication Date: 2020-05-12
- Inventor: Leonid Poslavsky , Liequan Lee
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Zilka-Kotab, P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B11/00 ; G01N21/956 ; G01N21/21 ; G03F7/20 ; G01B21/04 ; G01N21/95
Abstract:
A library expansion system, method, and computer program product for metrology are provided. In use, processing within a first multi-dimensional library is performed by a metrology system. During the processing within the first multi-dimensional library, a second multi-dimensional library is identified. The processing is then transitioned to the second multi-dimensional library. Further, processing within the second multi-dimensional library is performed by the metrology system.
Public/Granted literature
- US20150330770A1 LIBRARY EXPANSION SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT FOR METROLOGY Public/Granted day:2015-11-19
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