Invention Grant
- Patent Title: Pellicle frame and a pellicle using the same
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Application No.: US15851847Application Date: 2017-12-22
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Publication No.: US10649326B2Publication Date: 2020-05-12
- Inventor: Akinori Nishimura
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3c13343a
- Main IPC: G03F1/64
- IPC: G03F1/64 ; G06F1/00 ; G03F1/00 ; G06F7/20 ; G03F7/20
Abstract:
There is provided a pellicle frame and a pellicle using the frame, which has a hollow space inside a corner portion of the frame and optionally one or more hollow spaces in a straight portion (bar) of the frame, and also a hollow space in a corner portion of the frame may communicate with a neighboring hollow space in a straight portion of the frame.
Public/Granted literature
- US20180180991A1 PELLICLE FRAME AND A PELLICLE USING THE SAME Public/Granted day:2018-06-28
Information query
