Invention Grant
- Patent Title: Electrical mask validation
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Application No.: US15827618Application Date: 2017-11-30
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Publication No.: US10650111B2Publication Date: 2020-05-12
- Inventor: Daniel Corliss , Derren N. Dunn , Michael A. Guillorn , Shawn P. Fetterolf
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Sean M. Douglass
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L23/58 ; H01L21/027

Abstract:
An embodiment of the invention may include a method for ensuring semiconductor design integrity. The method may include analyzing a photomask design for a semiconductor circuit. The photomask may include a primary electrical design necessary for the operation of the semiconductor circuit, and white space, which has no primary electrical design. The method may include inserting a secondary electrical design into the white space of the photomask design for the semiconductor circuit. The secondary electrical design may have known electrical properties for validating the semiconductor circuit design.
Public/Granted literature
- US20190163857A1 ELECTRICAL MASK VALIDATION Public/Granted day:2019-05-30
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