- Patent Title: Using identifiers to map edge ring part numbers onto slot numbers
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Application No.: US16117797Application Date: 2018-08-30
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Publication No.: US10651097B2Publication Date: 2020-05-12
- Inventor: Evelio Sevillano , Thomas Chang , Robert O'Donnell , Ronda Ropes , Peter R. Wassei , Bridget Hill
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/687 ; H01L21/67

Abstract:
Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is being assigned to the edge ring carrier. The edge ring identifier is tracked to determine transfers into and out of the edge ring carrier and into and out of a processing station. The tracking of the edge ring identifier builds a metadata file that provides lifetime information regarding the edge ring.
Public/Granted literature
- US20200075430A1 USING IDENTIFIERS TO MAP EDGE RING PART NUMBERS ONTO SLOT NUMBERS Public/Granted day:2020-03-05
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