Invention Grant
- Patent Title: Method for producing pillar-shaped semiconductor memory device
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Application No.: US16148099Application Date: 2018-10-01
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Publication No.: US10651189B2Publication Date: 2020-05-12
- Inventor: Fujio Masuoka , Nozomu Harada
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L29/792 ; H01L27/11582 ; H01L27/11565 ; H01L21/28 ; H01L27/11575 ; H01L27/11573

Abstract:
A method for producing a pillar-shaped semiconductor memory device includes forming a mask on a semiconductor substrate and etching to form a semiconductor pillar on the semiconductor substrate. A tunnel insulating layer is formed and a data charge storage insulating layer is formed so as to surround the tunnel insulating layer, and a first conductor layer and a second interlayer insulating layer are formed on the semiconductor pillar. A stacked material layer is formed in a direction perpendicular to an upper surface of the semiconductor substrate, the stacked material layer including the first conductor layer and the second interlayer insulating layer. Data writing and erasing due to charge transfer between the semiconductor pillar and the data charge storage insulating layer through the tunnel insulating layer is performed by application of a voltage to the first conductor layer.
Public/Granted literature
- US20190043869A1 METHOD FOR PRODUCING PILLAR-SHAPED SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-02-07
Information query
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