Invention Grant
- Patent Title: Method for forming superconducting structures
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Application No.: US16107321Application Date: 2018-08-21
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Publication No.: US10651233B2Publication Date: 2020-05-12
- Inventor: Jeffrey David Hartman , Justin C. Hackley
- Applicant: Jeffrey David Hartman , Justin C. Hackley
- Applicant Address: US VA Falls Church
- Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
- Current Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
- Current Assignee Address: US VA Falls Church
- Agency: Tarolli, Sundheim, Covell & Tummino LLP
- Main IPC: H01L39/24
- IPC: H01L39/24 ; H01L27/18 ; H01L23/00

Abstract:
A superconducting structure includes a first superconducting device having a plurality of first superconducting contact pads disposed on a top side of a first superconducting device, a second superconducting device having a plurality of second superconducting contact pads disposed on a bottom side of a second superconducting device, and a plurality of superconducting bump structures with a given bump structure coupling respective superconducting contact pads of the plurality of first superconducting contact pads and the second plurality of superconducting pads to one another to bond the first superconducting device to the second superconducting device. Each superconducting bump structure includes a first under bump metallization (UBM) layer disposed on the top surface of a given superconducting contact pad, a second UBM layer disposed on the top surface of a given superconducting contact pads, and a superconducting metal layer coupling the first UBM layer to the second UBM layer.
Public/Granted literature
- US20200066789A1 METHOD FOR FORMING SUPERCONDUCTING STRUCTURES Public/Granted day:2020-02-27
Information query
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