Invention Grant
- Patent Title: Plasma processing apparatus and microwave output device
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Application No.: US15670194Application Date: 2017-08-07
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Publication No.: US10652991B2Publication Date: 2020-05-12
- Inventor: Koichi Yamamoto , Atsushi Itou
- Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker Botts L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5b25dcb4
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H05B6/68 ; C23C16/00

Abstract:
A plasma processing apparatus includes: a high voltage power supply for supplying a high voltage power to a magnetron; and a detector for detecting a microwave output from the magnetron, wherein based on a result of comparing a signal, which is obtained by adding an output from the detector to an AC component of a current detected from an output of the high voltage power supply, with a setting value of the output of the high voltage power supply, the output of the high voltage power supply is adjusted.
Public/Granted literature
- US20170367169A1 PLASMA PROCESSING APPARATUS AND MICROWAVE OUTPUT DEVICE Public/Granted day:2017-12-21
Information query
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