- Patent Title: Etchant composition for multilayered metal film of copper and molybdenum, method of etching using said composition, and method for prolonging life of said composition
-
Application No.: US15525817Application Date: 2015-11-17
-
Publication No.: US10655231B2Publication Date: 2020-05-19
- Inventor: Hideki Takahashi , Pen-Nan Liao , Ying-Hao Li
- Applicant: Kanto Kagaku Kabushiki Kaisha
- Applicant Address: JP Tokyo
- Assignee: Kanto Kagaku Kabushiki Kaisha
- Current Assignee: Kanto Kagaku Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Wolf, Greenfield & Sacks, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@253da73f
- International Application: PCT/JP2015/082229 WO 20151117
- International Announcement: WO2016/080383 WO 20160526
- Main IPC: C23F1/18
- IPC: C23F1/18 ; C23F1/26 ; C23F1/46

Abstract:
Provided is an etchant composition for a multilayered metal film comprising both a layer comprising copper and a layer comprising molybdenum, the etchant composition: being capable of etching en bloc a multilayered metal film comprising a layer constituted of copper or an alloy including copper as the main component and a layer constituted of molybdenum or an alloy including molybdenum as the main component; being effective in preventing the molybdenum layer from being undercut; making it easy to regulate the component concentrations so as to accommodate the cross-sectional shape control and cross-section; and being stable. Also provided are a method of etching using the etchant composition and a method for prolonging the life of the etchant composition. The etchant composition according to the present invention is an etchant composition for use in etching en bloc a multilayered metal film comprising a layer constituted of copper or an alloy including copper as the main component and a layer constituted of molybdenum or an alloy including molybdenum as the main component, and comprises hydrogen peroxide, an organic acid, an amine compound, an azole, and a hydrogen peroxide stabilizer (no inorganic acid is contained therein).
Public/Granted literature
Information query
IPC分类: