Invention Grant
- Patent Title: Physical quantity sensor, electronic device, and mobile body
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Application No.: US16251555Application Date: 2019-01-18
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Publication No.: US10656174B2Publication Date: 2020-05-19
- Inventor: Shota Kigure , Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6fb1a3d
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08
Abstract:
A physical quantity sensor has a first movable electrode section which has a portion facing a first fixed electrode section and a second movable electrode section which has a portion facing a second fixed electrode section, and is provided with a movable mass section which is formed in a shape which encloses a first fixed electrode side fixed section, a second fixed electrode side fixed section, a first movable electrode side fixed section, and a second movable electrode side fixed section in planar view.
Public/Granted literature
- US20190154727A1 Physical Quantity Sensor, Electronic Device, And Mobile Body Public/Granted day:2019-05-23
Information query
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