Invention Grant
- Patent Title: Optical apparatus, measuring apparatus, measuring method, screening apparatus, and screening method
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Application No.: US15100153Application Date: 2014-12-08
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Publication No.: US10656401B2Publication Date: 2020-05-19
- Inventor: Susumu Mori , Tomoya Saito
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@518a7de3
- International Application: PCT/JP2014/082386 WO 20141208
- International Announcement: WO2015/087824 WO 20150618
- Main IPC: G02B21/00
- IPC: G02B21/00 ; G01N21/64 ; G02B21/12 ; G02B5/26 ; G02B27/14 ; G02B5/22

Abstract:
An optical apparatus includes a first optical element and a second optical element capable of separating incident light according to a wavelength of the incident light. The first optical element includes a first separation section having first optical characteristics for reflecting light in a first wavelength band, transmitting light in a second wavelength band, and partially transmitting and partially reflecting light in a third wavelength band. The second optical element includes a second separation section having second optical characteristics for separating incident light that is incident in two wavelength bands including the first wavelength band or the second wavelength band and the third wavelength band into the light in the first wavelength band or the light in the second wavelength band and the light in the third wavelength band according to the wavelength.
Public/Granted literature
- US20170038572A1 OPTICAL APPARATUS, MEASURING APPARATUS, MEASURING METHOD, SCREENING APPARATUS, AND SCREENING METHOD Public/Granted day:2017-02-09
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