Invention Grant
- Patent Title: Cryostation system
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Application No.: US15129990Application Date: 2015-04-02
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Publication No.: US10658150B2Publication Date: 2020-05-19
- Inventor: Yasuhira Nagakubo , Toshiyuki Iwahori
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5d8cd0e2
- International Application: PCT/JP2015/060525 WO 20150402
- International Announcement: WO2015/152385 WO 20151008
- Main IPC: H01J37/20
- IPC: H01J37/20 ; G01N1/42 ; B01L7/04 ; B01L7/00 ; F25D3/10 ; G01N1/28 ; F25D21/04

Abstract:
The present invention stores a cooled sample subjected to freezing treatment, or the like, while preventing the formation of condensation and frost-like substances and loads the sample into a sample holder for observation using a charged particle beam device. The present invention is provided with a main body for storing a sample and a lid unit mounted above the main body and is characterized in that the main body is divided into a first space and a second space by a partition member; the first space accommodates a cooling medium for cooling the sample; the second space has, disposed therein, a heating unit for heating the cooling medium accommodated in the first space; and the lid unit has, formed therein, a discharge port for discharging the gas generated by the heating of the cooling medium to the outside.
Public/Granted literature
- US20170213693A1 Cryostation System Public/Granted day:2017-07-27
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