Invention Grant
- Patent Title: Tantalum sputtering target, and production method therefor
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Application No.: US15543738Application Date: 2016-05-17
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Publication No.: US10658163B2Publication Date: 2020-05-19
- Inventor: Kotaro Nagatsu , Shinichiro Senda
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee: JX NIPPON MINING & METALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7c6d8aa7
- International Application: PCT/JP2016/064538 WO 20160517
- International Announcement: WO2016/190160 WO 20161201
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; C22F1/18 ; C22C27/02 ; B22D7/00 ; C23C14/14 ; C22F1/00

Abstract:
Provided is a tantalum target, wherein, when a direction normal to a rolling surface (ND), which is a cross section perpendicular to a sputtering surface of a target, is observed via an electron backscatter diffraction pattern method, an area ratio of crystal grains of which a {100} plane is oriented in the ND is 30% or more. An object of the present invention is to provide a tantalum sputtering target in which a deposition rate can be appropriately controlled under high-power sputtering conditions. When sputter-deposition is performed using this kind of a tantalum target, it is possible to form a thin film having superior film thickness uniformity and improve the productivity of the thin film formation process, even for micro wiring.
Public/Granted literature
- US20170372879A1 TANTALUM SPUTTERING TARGET, AND PRODUCTION METHOD THEREFOR Public/Granted day:2017-12-28
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