Invention Grant
- Patent Title: Wafer dicing method
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Application No.: US16106690Application Date: 2018-08-21
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Publication No.: US10658239B2Publication Date: 2020-05-19
- Inventor: Lihui Lu , Chunchao Fei , Po Yuan Chiang , Yaping Wang
- Applicant: Semiconductor Manufacturing International (Beijing) Corporation , Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Beijing CN Shanghai
- Assignee: Semiconductor Manufacturing International (Beijing) Corp.,Semiconductor Manufacturing International (Shanghai) Corp.
- Current Assignee: Semiconductor Manufacturing International (Beijing) Corp.,Semiconductor Manufacturing International (Shanghai) Corp.
- Current Assignee Address: CN Beijing CN Shanghai
- Agency: Brinks Gilson & Lione
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4233e496
- Main IPC: H01L21/301
- IPC: H01L21/301 ; H01L21/46 ; H01L21/78 ; B23K26/40 ; B23K26/53 ; B23K26/00 ; H01L21/683 ; H01L21/304 ; B23K26/57 ; B23K101/40 ; B23K103/00

Abstract:
This disclosure provides wafer dicing methods, and relates to the field of semiconductor technologies. Implementations of the dicing method may include: performing laser stealth dicing processing on a wafer from a back surface of the wafer; performing grinding and thinning processing on the back surface of the wafer after performing the laser stealth dicing processing; sticking a dicing tape on the back surface of the wafer after performing the grinding and thinning processing; and performing separation processing on the wafer after sticking the dicing tape. In some implementations, stealth dicing (SD) is performed before grinding, so that a laser is directly imposed on a back surface of a wafer, thereby alleviating a laser attenuation problem and lowering requirements on light transmittance of a dicing tape.
Public/Granted literature
- US20190181045A1 WAFER DICING METHOD Public/Granted day:2019-06-13
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