Invention Grant
- Patent Title: Method for manufacturing semiconductor device
-
Application No.: US16286334Application Date: 2019-02-26
-
Publication No.: US10658272B2Publication Date: 2020-05-19
- Inventor: Hiroaki Takahashi
- Applicant: KABUSHIKI KAISHA TOSHIBA , TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Current Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Kim & Stewart LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@66abdff3
- Main IPC: H01L23/495
- IPC: H01L23/495 ; H01L23/00 ; H01L23/535

Abstract:
A method for manufacturing a semiconductor device includes forming a first metal layer above a substrate of a semiconductor chip, forming a nickel layer on the first metal layer, performing a first cleaning treatment on the nickel layer with diluted hydrochloric acid having a concentration of less than 1% by weight, forming a gold layer on the nickel layer, and connecting a bonding wire to a surface of the gold layer.
Public/Granted literature
- US20200091044A1 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2020-03-19
Information query
IPC分类: